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  6. Built-in linear encoder high-resolution positioning device

Built-in linear encoder high-resolution positioning device

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last updated:Jun 03, 2019

シグマ光機
シグマ光機
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High-resolution positioning can be achieved with the feedback stage that incorporates a new type of stage controller and a linear encoder.

[Features of the New Feedback Stage Controller] While maintaining compatibility with conventional products, it has become multifunctional due to additions such as: - Increased number of communication commands - Added teaching function - Added USB interface - Increased number of parameters This allows for better understanding of the feedback stage's status and the ability to set detailed parameters. [Features of the High-Resolution Positioning Device] It consists of a feedback stage and the new feedback stage controller. By using the position information detected by the built-in linear encoder in the feedback stage for feedback control, high resolution and high reproducibility are achieved. [Benefits of Implementation] - Improved work efficiency due to high positioning reproducibility - Fine adjustments possible due to high-resolution operation - Movement and fine adjustments of samples can be performed with one feedback stage due to the long range of motion For more details, please contact us or download the catalog. □ A Q&A collection that helps in stage selection can be downloaded for free from the link below. □

    Other semiconductor manufacturing equipmentOther inspection equipment and devicesOther microscopes
高分解能位置決め装置.png

Built-in linear encoder high-resolution positioning device

高分解能位置決め装置.png
高分解能位置決め装置.png
  • Related Link - https://www.global-optosigma.com/jp/

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basic information

○1nm Resolution Positioning Device Resolution: 1nm (relative to the reading value of the built-in encoder) Maximum movement speed: 5mm/s (when using FC-911 controller) Movement range: 20mm to 50mm ○10nm Resolution Positioning Device Resolution: 10nm (relative to the reading value of the built-in encoder) Maximum movement speed: 10mm/s (excluding some stages) Movement range: 20 to 200mm/s

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Applications/Examples of results

The feedback stage system has been used in various fields in recent years. Typical application areas include information and communication, optics, semiconductors, and biotechnology. Examples include: positioning during MEMS inspection, optical system delay stages, and microscope stages.

Line up(4)

Model number overview
FS-1020UPX 1nm resolution positioning stage, 20mm travel range, built-in linear encoder
FC-911 1nm resolution positioning stage controller, built-in motor driver, feedback control
FS-1050PX 10nm resolution positioning stage
FC-511 10nm resolution positioning stage controller

catalog(6)

Download All Catalogs
Precision Positioning Stage 'Q&A You Should Know When Selecting'

Precision Positioning Stage 'Q&A You Should Know When Selecting'

OTHER
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Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

Feedback Stage System Comprehensive Catalog (Atmosphere/Vacuum) 5th Edition

CATALOG
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Submicron Feedback Stage System Catalog

Submicron Feedback Stage System Catalog

PRODUCT
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10nm Feedback Stage System Catalog

10nm Feedback Stage System Catalog

PRODUCT
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5nm Feedback Stage System Catalog

5nm Feedback Stage System Catalog

PRODUCT
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1nm Feedback Stage System Catalog

1nm Feedback Stage System Catalog

PRODUCT
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Company information

シグマ光機

シグマ光機

Testing, Analysis and Measurement

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The Sigma Koki Group, under the global brand "OptoSigma," is committed to its mission as a "light solution company" in both domestic and international markets, carrying the spirit of "gratitude," "challenge," and "creation." We will continue to actively expand our business and strive for sustainable growth as one united company. We sincerely ask for your understanding and support for the Sigma Koki Group as we pursue true "manufacturing" in the future.

Product/Service List (78)

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The related categories of Other semiconductor manufacturing equipment

  • Measurement and Analysis
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  • Microscopes
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  • Semiconductor Manufacturing Equipment
  • Other semiconductor manufacturing equipment
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  • #High resolution positioning device
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