High flatness and high positional accuracy carrier
The "Silicon Carrier" is a high-precision carrier that allows for the transport of small-diameter wafers and irregularly shaped wafers without modifying semiconductor manufacturing equipment, enabling processes in both atmospheric and vacuum environments. We will process (grind and polish) and assemble 2 to 12-inch silicon wafers to accommodate your substrates. Additionally, we can handle various materials other than silicon, including quartz, metals, and ceramics. Please feel free to consult us with your requests. 【Features】 ■ High-precision grinding (depth of 30μm and above, processing of φ200mm seat holes, etc.) ■ High flatness ■ High positional accuracy ■ Fixing methods tailored to various devices *For more details, please download the PDF or feel free to contact us.
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【Product List】 ■ Silicon carriers for exposure grinding ■ Silicon carriers for ion implantation ■ Silicon carriers for etching and deposition ■ Silicon carriers for annealing ■ Custom SC *For more details, please download the PDF or feel free to contact us.
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For more details, please download the PDF or feel free to contact us.
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Carrier Integration Co., Ltd. is a company primarily engaged in the manufacturing and sales of silicon carriers. We handle exposure device silicon carriers and silicon carriers for ion implantation equipment, among others. Additionally, upon request, we can process materials other than silicon, so please feel free to consult with us.