This is a vacuum drying device that allows recipe operation through touch panel control.
The "VD-400" is a vacuum chamber designed for vacuum drying glass substrates after resist coating. 【Features】 - Simplified operation through touch panel control - Recipe operation available (allows for reproduction of operating procedures) - Two-stage exhaust to implement drying while suppressing wind patterns and foaming - Adoption of a butterfly valve allows for setting vacuum exhaust capacity 【Main Specifications】 ○ Chamber: External dimensions 400mm x 400mm, height 103mm (when lid is closed) Internal dimensions 350mm x 350mm, height 30mm ○ Vacuum: Achievable vacuum level of approximately 1Pa or lower (under no load) *For more details, please contact us or download the catalog.
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【Specifications】 〇Chamber: External dimensions 400mm x 400mm, height 103mm (when lid is closed) Internal dimensions 350mm x 350mm, height 30mm 〇Vacuum system: Achievable vacuum level below 1Pa (without sample) Dry pump 250L/min 〇Decompression method: Pressure mode - automatically releases to atmosphere when set pressure is reached Time mode - automatically releases to atmosphere after set time of decompression 〇Utilities: 3Φ AC200: Dry air 0.4–0.6MPa: Vacuum exhaust 〇External dimensions: (W) 1000 x (L) 800mm x (H) 1600mm 〇Device weight: Approximately 250kg *The above items can be changed according to requirements. ●For more details, please contact us or download the catalog.
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Since our founding in 1972, we have supported engineers and researchers involved in displays. We manufacture and sell various glass substrates and world-standard EHC cells both domestically and internationally, which are the core of our business. In recent years, there has been a growing demand for diverse metal deposition substrates and high-resolution patterned glass substrates. As peripheral equipment, we provide custom small LCD panel assembly systems, wet process equipment, and measurement and inspection devices for organic EL and solar cells, either as dedicated systems or including simple jigs and other components.
