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  5. Flow Control
  6. Leave high differential pressure and large flow rates to Burkert's MFC!

Leave high differential pressure and large flow rates to Burkert's MFC!

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Burkert mass flow controller

last updated:Oct 02, 2026

ビュルケルトジャパン
ビュルケルトジャパン
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The Burkert MFC can handle high differential pressure (2.2 MPa) and high flow rates (2500 lN/min). It is compatible with air and various other gases!

For over 70 years, we have cultivated technology and achievements as a long-established manufacturer of fluid control devices specializing in electromagnetic valves and flow control valves. We realize mass flow control of gases with MFC even under high differential pressure and high flow rates. 【One unit performs multiple roles, reducing total costs!】 ● By accommodating high differential pressure (2.2 MPa), there is no need for pressure-reducing valves or regulators that were previously required. ● By supporting high flow rates (2500 lN/min (N2)), multiple MFCs can be consolidated into one unit. ● Capable of controlling flow rates from low to high (for example, 50 to 2500 lN/min (N2)) with a single unit. ● Models compatible with ammonia are also available. ● Equipped with inline sensors to achieve smooth control even at low differential pressures. ● Complete shut-off is achieved with resin seals and shut-off functions. 【Easy to introduce & ready for immediate use!】 ● Shipped calibrated, so no setup or adjustments are needed for immediate use. ● No dedicated power supply is required (operates on DC24V), making it easy to implement. 【Unique to Bürkert & IoT generation】 ● Compatible with communication methods such as OpenCAN, fieldbus, and RS485. ● Proposals focusing on maintenance and space-saving features are also possible!

    Flow Control
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Leave high differential pressure and large flow rates to Burkert's MFC!

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temp.jpg Fig2.jpg app.jpg EDIP-graphical-programming_full_detail.jpg
  • Gas: Mass Flow Management 874x-Serie (English)
  • Special site - Product/service details - https://pr.mono.ipros.com/burkert/product/

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basic information

**Features** By incorporating our unique high-performance proportional electric valve, we have successfully developed an MFC that covers the functions of several conventional MFCs, pressure reducing valves, and shut-off valves. - By supporting high differential pressure (2.2MPa), the pressure reducing valve and regulator that were previously necessary are no longer needed. - By accommodating large flow rates (2500lN/min (N2)), multiple MFCs can be consolidated into one unit. - It can handle flow rates from small to large with a single unit. (For example, it can cover 50–2500lN/min (N2) with one unit.) - Models compatible with ammonia are also available in the lineup. - Calibration is performed before shipment from the factory, so there is no need to input gas coefficients individually. - Gas control and flow measurement can be performed immediately after installation. - No special power supply unit is required; it can be used with a standard DC24V. - We will provide optimal proposals based on our rich lineup according to your application and usage conditions.

Price information

The price varies depending on the quantity, so please feel free to contact us.

Delivery Time

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Applications/Examples of results

■Frame thermal spraying / Plasma spraying ■Stirring of casting / melting furnaces ■Exhaust gas combustion system for semiconductors ■Gas flow control for various analytical instruments ■Plasma control   and so on...

Detailed information

  • Fig2.jpg

    Ideal for applications that require precise control of various gas types. We offer MFCs not only for high differential pressure and high flow rates but also for a variety of gases such as neutral gases, inert gases, and ammonia. They can also be used in applications such as flame spraying, plasma spraying, and stirring in casting/melting furnaces.

  • app.jpg

    We also propose gas control units that include MFCs! Not only do we offer high-performance standalone MFCs, but we also provide proposals for multiple MFCs and various sensors as a unit, taking into account maintainability and ease of use. Compared to conventional MFCs, our unique solutions, which can perform multiple roles with a single unit, enable maintenance and space-saving for the gas control you are considering (for example, proposals for gas control units) are also possible!

  • EDIP-graphical-programming_full_detail.jpg

    New IoT Generation MFC Now Available A new MFC that supports OpenCAN and burkert's dedicated BUS has been introduced, matching the IoT orientation. Connectivity to networks and PCs, as well as smart control of multiple MFCs, is planned to be implemented sequentially. We especially encourage consideration for the introduction of mass flow in research labs and small lab buildings!

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[Information] Leave high differential pressure and large flow rates to Burkert's MFC!

[Information] Leave high differential pressure and large flow rates to Burkert's MFC!

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ビュルケルトジャパン

ビュルケルトジャパン

Industrial Machinery

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Founded in 1946 in Southern Germany, Bürkert has been a long-established manufacturer of fluid control equipment for over 70 years, producing valves, solenoid valves, sensors, mass flow controllers, and more for various applications. Today, we have five factories in Germany and France and have grown into a global company with sales offices in 37 countries. Bürkert Japan, celebrating its 25th anniversary, offers a lineup of products tailored to Japanese standards and practices. In recent years, the introduction of IoT in many production sites has become a hot topic, with discussions not only on efficiency and cost reduction but also on predictive maintenance and smart solutions leveraging IoT. Bürkert provides solutions that easily achieve automatic regulation with IoT devices for process automation. We support various communication formats to realize IoT applications that are beneficial on-site. We offer a wide range of solutions, not only providing individual components like control valves and sensors but also system proposals, so please feel free to consult with us.

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