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  6. Metal-free / Liquid use C31 type fluororesin pressure sensor

Metal-free / Liquid use C31 type fluororesin pressure sensor

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GEMÜ C31 Hydra-Sensor

last updated:Sep 26, 2023

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High-precision pressure sensor for high-purity fluids.

The C31 type is a high-quality pressure transmitter that operates with a pressure medium. It features a metal-free structure primarily designed for the semiconductor and microelectronics industries. Since all wetted parts are made of PTFE or PFA, it is ideal for corrosive and aggressive fluids, as well as high-purity fluids. The three-layer diaphragm structure ensures reliable isolation between the process fluid and the sensor, guaranteeing stable measurements over the long term.

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Metal-free / Liquid use C31 type fluororesin pressure sensor

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  • Related Link - https://www.gemu-group.com/ja_JP/mess-und-regeltec…
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basic information

- Compatible with various electrical connections - Measurement error is ±0.5% 【Measurement range】 -100 to 600 kPa * psi and Bar display also available 【Nominal diameter】 1/4" to 1-1/4" 【Applicable fluids】 Corrosive and high-purity gases and liquids 【Fluid temperature】 5 to 60℃ 【Ambient temperature】 -20 to 60℃ 【Body material】 PTFE, PFA 【Diaphragm material】 PFA 【Connection】 Flare, NPT threaded 【Supply voltage】 DC 10 to 30V 【Input signal】 4 - 20mA 【Output signal】 4 - 20mA

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Applications/Examples of results

- Chemical supply in the wet process of semiconductor manufacturing - Supply and transportation of ultra-high purity chemicals for LED and integrated circuit manufacturing - Filling of chemical substances - Wet process in integrated circuit manufacturing plants - Etching, coating, and cleaning processes - Slurry systems in microelectronics - Supply systems for ultra-high purity solvents

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High-purity chemicals and component and system solutions for semiconductor manufacturing processes.

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GEMÜ provides value through its cutting-edge manufacturing capabilities and new technology development. We have strong connections with the pharmaceutical industry worldwide and have been engaged in the development and improvement of valves. As a result, we offer a wide range of products, including "sanitary diaphragm valves," which require sterility, and "valves specialized for semiconductor manufacturing," which demand high control precision. We have established six manufacturing sites around the world and provide services in over 50 countries. As a leading company in the sanitary valve market, our products are adopted in many plants. We actively engage in research and development, with over 5% of our annual sales allocated to development investments. Thanks to this effort, we have been recognized by the Institute for Management and Economic Research (IMWF) in Germany as a technology company promoting digitalization.

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