Ultra-low temperature ALD device CMVA-1000 for TGV (maximum 600 corners)
CMVA-1000
Compatible with high aspect ratio TGV/TSV. The world's largest chamber size for ALD (1000mm□).
【Features】 - OH radical oxidation using bubbling H2O/Ar and High Density Plasma - Dense and well-covered film formation; capable of forming dense, homogeneous films with uniform thickness - Compatible with most metal oxide films - Excellent adhesion on any substrate (material, flatness, shape, etc.) - Control of film thickness according to application - Film formation possible at room temperature 【Application Examples】 - Capable of large area applications - TGV/moisture-proof films 【Consultation for Film Formation and Test Coating Available】 At Creative Coatings, we accept requests for test coatings and sample creation. We can listen to your needs and suggest suitable equipment, types of films, and film thicknesses. Please feel free to consult with us. ++++++++++++++++++++++++++++++ We provide next-generation vapor phase technology demanded by the times and environment. We contribute to technological innovation with our dual technology of low-temperature (room temperature) ALD equipment for semiconductors and powder low-temperature (room temperature) ALD film formation equipment.
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basic information
【Chamber Size】 □1000mm 【Film Deposition Specifications】 ・For film deposition on organic materials, etc. Work Types: Wafers, metals (SUS, aluminum, copper, etc.), resins, films, and others Work Size: Shapes are not restricted as long as one side is approximately 100mm ・For film deposition on magnetic powders, all-solid batteries, metal nanoparticles, etc. Work Types: Magnetic powders, all-solid batteries (sulfide-based, oxide-based), metal nanoparticles, and others Work Size: Shapes are not restricted as long as the diameter is 100mm or more 【Applicable Films】 SiO₂, Al₂O₃, TiO₂, ZrO₂, HfO₂, etc. *As we design and manufacture our own equipment, we can discuss chamber sizes and film deposition specifications. Please feel free to contact us.
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Applications/Examples of results
【Examples of PET Bottle Coating Utilization】 ■ Encapsulation of Alcoholic Beverages - Lightweighting and long-life enhancement of beer and wine ■ Encapsulation of Pharmaceuticals and Cosmetics - Cost reduction of the container itself - Unique design and transparency of PET - Acid and alkali encapsulation ■ Fuel Encapsulation - Lightweight small fuel cells - Flexible fuel tanks 【Other Application Examples】 ■ Medical Devices - Resin catheters - Minimally invasive biosensors (blood glucose) - Biocompatibility for artificial objects - Implants - Artificial bones, etc. ■ Surface Treatment for Coating (Surface Modification) - Portable flexible substrates - Coating of substrates with mixed dissimilar components - Adhesive bonding promotion ■ Corrosion Coating for Metal Pipe Components - Mechanical parts - Pipe components ■ Coating for High-Performance Toner
Line up（2）
| Model number | overview |
|---|---|
| Low Temperature (Room Temperature) ALD Equipment CMVA-500 | Chamber size: □500mm, capable of depositing various powders (suitable for mass production), can deposit on high aspect ratio TGV/TSV |
| Low Temperature (Room Temperature) ALD Equipment CMVA-300 | Chamber size: □300mm, capable of depositing various powders, can deposit on high aspect ratio TGV/TSV, ideal for R&D use |
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One of the key technologies for achieving carbon neutrality is next-generation batteries, along with nanoscale functional particles with various capabilities, the proliferation of 5G and 6G communication systems and environmentally friendly vehicles, and the advancements in advanced driver-assistance systems (ADAS). There is a growing expectation for our coating technology in various fields of society, including passive components such as MLCCs, which require miniaturization and high reliability, high-quality healthcare through digital transformation (DX), and medical devices advancing with AI and digitalization.
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