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  6. Outgas analysis using a gas concentration device with GC/MS.

Outgas analysis using a gas concentration device with GC/MS.

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last updated:Apr 02, 2026

一般財団法人材料科学技術振興財団 MST
一般財団法人材料科学技術振興財団 MST
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GC/MS: Gas Chromatography-Mass Spectrometry

The gas generation concentration device is an apparatus that traps gases generated from samples placed inside a chamber into a collection tube. By trapping in the collection tube, trace amounts of desorbed components can be concentrated and measured with high sensitivity using GC/MS. Depending on the type of sample, a suitable size of chamber can be selected, and it can accommodate heating up to 350°C. - Compatible with relatively large samples (on the order of several centimeters) - Allows for measurements with 2 to 3 orders of magnitude higher sensitivity compared to the headspace method - Enables evaluation of organic contamination from both sides of a wafer - Allows for evaluation of organic contamination on photomasks (reticles) - Quantitative analysis using hexadecane, decamethylcyclopentasiloxane, etc., is possible.

    Contract Analysis
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Outgas analysis using a gas concentration device with GC/MS.

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B0241.jpg
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Analysis of electronic components, manufacturing equipment, parts, and daily necessities.

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Outgas analysis using a gas concentration device with GCMS_B0241

Outgas analysis using a gas concentration device with GCMS_B0241

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"Technical Information: Analysis of Lauryl Sulfate in Daily Necessities" and two other items published.

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We have published the following three analysis case studies on the MST website: - Analysis of lauryl sulfates in everyday products - Outgas analysis using a gas concentration device For more details, please visit the MST website. http://www.mst.or.jp/

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一般財団法人材料科学技術振興財団 MST

一般財団法人材料科学技術振興財団 MST

Testing, Analysis and Measurement

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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