Adopting SiC-MOSFET as the switching element significantly reduces power loss.
The "High Voltage Semiconductor Switch" is a power supply device that generates high-speed pulses at high voltage. It connects 90 FETs in series to achieve switching of up to 90kV. The operating frequency allows for pulse operation from DC to 5kHz. Additionally, it has advantages such as low on-resistance and high-speed switching, and it incorporates two 90kV switch units for power supply and discharge. We handle everything from the design and development of the switch unit circuit board, manufacturing and adjustment, to the creation of cooling systems, leading to product commercialization. 【Applications】 ■ Pulse power supply for gyrotrons in fusion devices ■ Pulse power supply for EUV lasers ■ Medical X-ray control ■ Pulse power supply for klystrons in accelerators *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications (Partial)】 ■Maximum Voltage: 90kV ■Peak Current: 10Ap ■Operating Frequency: DC to 5kHz max ■Dimensions: H1195×W800×D1195 mm *For more details, please refer to the PDF document or feel free to contact us.
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Nuclear fusion device, accelerator, film deposition device
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At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.