Adopting electrically neutral atomic beams! Surface analysis equipment that solves charging issues.
The "TOFLAS-3000" is a time-of-flight atomic scattering surface analysis device that uses an electrically neutral atomic beam instead of ions as the incident probe. By using this product, it is possible to analyze the composition and atomic arrangement of not only semiconductors and metals but also the surfaces of insulators. Additionally, it resolves the issue of charging (charge-up). 【Features】 ■ Demonstrates powerful performance in surface analysis of metals, semiconductors, and insulators ■ Capable of identifying elements on the sample surface ■ Allows for atomic structure analysis of several layers beneath the surface ■ Capable of determining the polarity of the sample surface ■ Supports real-time monitoring of dynamic processes on the surface ■ Measurements can be taken without influence in electric and magnetic fields *For more details, please download the PDF or feel free to contact us.
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basic information
【Measurement Mode】 ■TOF Spectrum Measurement ■Polar Angle Measurement ■Azimuth Angle Measurement ■Omnidirectional Scan (Polar Plot) *For more details, please download the PDF or feel free to contact us.
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【Application Examples】 ■ Monitors for single-layer growth in thin film growth ■ Determination and evaluation of thin film growth modes ■ In-situ analysis of thin film growth processes in strong magnetic fields ■ Analysis of samples in an electrically floating state ■ Polarization discrimination of sample surfaces using pole figures ■ Identification of surface-segregated elements, etc. ■ High-sensitivity and high-resolution elemental analysis using simplified SIMS *For more details, please download the PDF or feel free to contact us.
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At Pascal Corporation, we handle a variety of experimental equipment useful for research and development, including vacuum devices such as PLD/laser MBE systems, surface analysis equipment like atomic scattering spectrometers, cryogenic refrigeration systems, and Agilent (Varian) vacuum pumps. With a global perspective in vacuum equipment and scientific instruments, we constantly look ahead of the times, anticipate new technologies and product needs, and continue to provide products that are beneficial to our users.