<High precision, high speed, high rigidity> We offer specifications of all sizes for both atmospheric and vacuum applications!
This catalog is the product catalog of Aitec Co., Ltd., a specialized manufacturer of robots for transporting semiconductor wafers and glass substrates. It includes the "Wafer Vacuum Transport Robot (up to 450mm)" as well as the "GLASS Vacuum Transport Robot (G2-G5 generations)" and the "GLASS Atmospheric Transport Robot (up to G4 generation)." [Contents] ■ Wafer Vacuum Transport Robot (up to 450mm) ■ Wafer Atmospheric Transport Robot (up to 450mm) ■ GLASS Vacuum Transport Robot (G2-G5 generations) ■ GLASS Vacuum Transport Robot (G5.5-G8.5 generations) ■ GLASS Atmospheric Transport Robot (up to G4 generation) *For more details, please download the PDF or feel free to contact us.
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Aitec Co., Ltd. develops, manufactures, and sells transport equipment for semiconductor and LCD glass substrate production, as well as clean robots and other products. We offer specifications for all sizes suitable for both atmospheric and vacuum environments. In particular, we are capable of supporting robots for large glass substrates (2nd to 8.5th generation), characterized by high precision, high speed, and high rigidity.