Tabletop plasma etching device capable of localized processing with unique spot plasma technology.
The "TP-50B" is a 50W model that does not require installation permission applications under the Radio Law, and it is an easy-to-operate tabletop plasma etching device that allows for casual plasma processing. With its unique spot plasma technology, it enables localized processing and can handle a wide range of plasma processing from pre-treatment of semiconductor failure analysis samples (exposing wiring) to various plasma applications. Additionally, its compact size makes it suitable for use in research labs with limited space. 【Features】 ■ Compact tabletop size ■ Capable of localized plasma processing (Φ0.5mm and above) ■ Achieves low residue and high-speed processing (10μm/min) ■ Low-output RF power supply (maximum output of less than 50W) ■ Allows for extensive processing by moving the sample on the stage *For more details, please download the PDF or feel free to contact us.
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basic information
【Specifications (Excerpt)】 ■Device dimensions: 240mm(W) × 390mm(D) × 350mm(H) ■Weight: 20kg ■Vacuum pump: Dry pump (15L) ■Processing range: 28mm × 28mm (when using optional stage) 0.5~4mm ■Compatible gases: CF4, N2, D.A, Ar, O2, etc. *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Surface modification ■ Removal of insulating films from semiconductor devices ■ Backside processing of semiconductor devices ■ Plasma cleaning ■ Etching of various materials *For more details, please download the PDF or feel free to contact us.
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Narasaki Sangyo Co., Ltd. "Functional Materials Division" specializes in high-performance material contract processing. The materials we handle fall into "five categories": 1. Ceramics/Glass 2. Metals 3. Engineering Plastics 4. Carbon 5. Surface Treatment We offer a wide range of services, and if you provide us with a single production drawing, we can deliver various materials and surface treatments as a one-stop solution. We cater to everything from general-purpose to specialty materials, including high-precision, fine, electrical discharge, laser processing, as well as surface treatments such as coating, precision cleaning, and blasting. Our particular strength lies in high-precision and short-lead-time processing of ceramics. By machining from pre-fired materials, we achieve short lead times for ceramics that traditionally take several months. We handle a wide range of ceramics, including machinable ceramics like Hotovel, as well as fine ceramics such as alumina and zirconia, and non-oxide ceramics like silicon carbide, silicon nitride, and aluminum nitride. We are also actively engaged in proposing cost reductions for overseas ceramics and other international materials. We can accommodate various contract processing projects, from prototype development starting with a quantity of one to mass production.