Achieving non-destructive and non-contact measurement of electrical characteristics of 4-inch and 6-inch wafers!
The "Tera Evaluator" is a new terahertz spectrometer that incorporates ellipsometry technology. Its use of a reflective optical system makes it suitable for measuring opaque materials. It comes standard with a mapping stage for measuring 4-inch and 6-inch wafers, enabling non-contact and non-destructive inspection of semiconductor wafers. By measuring the time waveform of the electric field intensity of electromagnetic wave pulses, both the electric field intensity and phase information can be measured simultaneously. By analyzing the differences in time waveforms between the reference and the sample, the frequency dependence of the sample's complex permittivity (complex refractive index) can be obtained. 【Features】 ■ Non-destructive and non-contact measurement of carrier concentration and mobility ■ Capable of measuring complex permittivity in the terahertz range ■ Liquid samples can also be measured ■ Standard software for analysis: THz Analysis ■ A system that allows external input of lasers can be constructed *For more details, please refer to the PDF document or feel free to contact us.
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【Specifications】 ■ Measurement Method: THz Time-Domain Ellipsometry ■ Measurement Signal: Time waveform of electric field intensity ■ Output Data: Ellipsometric parameters, complex refractive index / permittivity / electrical conductivity (using analysis program) ■ Sample Configuration: Horizontal configuration (measurement surface: top surface) ■ Measurement Bandwidth: 0.5 to 3 THz or more (output range based on standard samples) ■ Femtosecond Pulse Laser - Central Wavelength: Around 780 to 800 nm, Pulse Width: Less than 100 fs (※ External introduction is also possible) ■ Control PC - A computer that meets the operating conditions of Windows 7 (32-bit version) - Requires one wired LAN port and at least two USB ports for connection with Tera Evaluator ■ Software: Measurement software, analysis software ■ Dimensions / Weight: 732(W) × 585(D) × 500(H) mm, approximately 85 kg (※ Does not include wiring, protrusions, etc.) ■ Power Supply: AC100 V (50/60 Hz) 10A (However, a separate power supply for the laser is recommended) ※ For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Nihon Precision Co., Ltd. started with the aim of designing and manufacturing semiconductor manufacturing equipment, inspection equipment, and peripheral automation devices, and has received high praise for its technological capabilities in this field. Since then, the technologies and know-how cultivated here have also been applied to the fields of scientific instruments such as infrared spectrometers and infrared microscopes. Currently, we are steadily achieving results in a wide range of advanced mechatronics products, including computer-aided automatic inspection systems, FA, transport robots, and control devices, thereby establishing our customers' trust as a technology group that plays a significant role in the manufacturing processes of semiconductors and liquid crystals. In response to the rapidly changing business environment and to strengthen our competitiveness, we have newly constructed and completed an additional building alongside our existing two factory buildings and have commenced operations. We are now capable of increasing production of various semiconductor manufacturing equipment, as well as manufacturing next-generation large liquid crystal panel manufacturing equipment and CVD manufacturing equipment for thin-film solar cells. We have embarked on a new journey to meet the diverse needs of our customers.
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