Safety guidelines for fire risk assessment and mitigation for semiconductor manufacturing equipment.
"SEMI S14" provides considerations that assist in assessing and mitigating the risks of fire and combustion by-products related to equipment and products. It applies to asset protection but not to human protection. In the "SEMI S10" risk assessment, the fire risk assessment for equipment is delegated to "SEMI S14." On the other hand, it is recommended to use the methods from SEMI S10 for estimating risks. As a fundamental premise, it identifies the three elements of fire: fuel, oxidizer, and ignition source. By removing one or more of these three elements, the fire risk can be eliminated. It provides detailed descriptions of the considerations to be taken into account when conducting risk assessments regarding fuel, oxidizers, and ignition sources. *For more details, please refer to the PDF document or feel free to contact us.*
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In 1992, our company was established by engineers engaged in safety management and quality control of nuclear power plants as a company that conducts safety and quality inspections of industrial machinery. In the following year, 1993, we began our business in SEMI guideline compliance evaluation. Since then, based on our experience in the SEMI business and the know-how cultivated in the engineering and semiconductor field, we provide total support related to the safety of semiconductor manufacturing equipment, including: 1. Safety evaluation services as a third-party organization (SEMI S2/S8, CE marking, etc.) 2. Creation and translation of product documentation 3. Creation and sales of warning labels Our company tests and evaluates product safety from the design stage and responds to our customers' diverse safety requirements with a "One Stop" solution. The testing items cover a wide range, including mechanical, electrical, EMC (electromagnetic compatibility), F47/F42 evaluation tests, chemical (tracer gas tests, etc.), pressure, and environmental aspects. Additionally, for hazardous energy that cannot be eliminated from the product, we provide follow-up with warning labels and documentation. We offer a consistent service that includes safety reviews, warning labels, and product manuals.