It is possible to evaluate trace metals in ppm orders.
When designing and controlling the properties of various materials, it is very important to clarify the types and amounts of elements present in trace amounts in the base material, as well as their states of existence. The types and amounts of elements can be evaluated using methods such as SIMS (Secondary Ion Mass Spectrometry) and ICP-MS (Inductively Coupled Plasma Mass Spectrometry), but the evaluation of states of existence, such as valence and chemical bonding states, is effectively conducted using XAFS (X-ray Absorption Fine Structure) measurements with synchrotron radiation. This document introduces a case study where the valence of trace amounts of Ce in ceramic materials was evaluated as a measurement example.
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Analysis of LSI, memory, lighting, and oxide semiconductors.
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