In-situ monitoring of process gases with a time-of-flight high-resolution mass spectrometer!
The semiconductor process includes various steps such as crystal growth (epitaxial growth), film deposition (CVD, ALD), etching, and cleaning. Additionally, a variety of raw material gases are used in these processes. By monitoring the reaction products, decomposition products, and residual components in the process chamber in real-time, we can improve yield, enhance productivity, and contribute to the development of next-generation semiconductor technologies. The Kanomax 'infiTOF', a mass spectrometer with high resolution and real-time measurement capabilities, supports the research, development, and manufacturing of higher quality products. 【Solutions】 ■ Real-time measurement of process gases ■ Portability suitable for on-site measurements *For more details, please refer to the PDF document or feel free to contact us.
Inquire About This Product
basic information
【Features of infiTOF】 ■ Multi-turn TOF analyzer ■ Compact design with excellent portability ■ Real-time measurement in fixed locations ■ High resolution, precise mass measurement ■ Energy-saving design *For more details, please refer to the PDF materials or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
catalog（1）
Download All Catalogs![[Analysis Case] Semiconductor Process Gas Monitoring infiTOF-DUO](https://image.mono.ipros.com/public/catalog/image/01/4b1/479194/IPROS17482511472726164390.jpeg?w=120&h=170)
Company information
Our corporate philosophy of "Living through Creativity and Innovation" integrates two ideas: the concept of "Living through Creativity," which is also the founding principle of our company, and "Innovation = Innovation," which we have established as the most important concept with the launch of our new management system. "Creativity" is an expression of creativity and is a very exciting word. It also means creating unique products, services, and technologies, and it embodies our hope that this will continue to be valued as our reason for existence for all eternity. To create "uniqueness," we are committed to continuous, relentless innovation every day, aiming for "number one," which reflects the sentiment embedded in our corporate philosophy.
