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  6. [Analysis Case] Comparison of Secondary Electron Images of Cu Surface Using SEM and SIM

[Analysis Case] Comparison of Secondary Electron Images of Cu Surface Using SEM and SIM

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last updated:Sep 17, 2025

一般財団法人材料科学技術振興財団 MST
一般財団法人材料科学技術振興財団 MST
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It is effective to differentiate between the two methods depending on the surface structure of interest.

Scanning Electron Microscopy (SEM) and Scanning Ion Microscopy (SIM) are both techniques used to evaluate the structure near the surface of a sample by obtaining secondary electron images. Differences in the primary probes lead to variations in contrast and spatial resolution, making it effective to choose between the two methods depending on the surface structure of interest. This document summarizes the comparison of the two methods and presents an example of measurements observing a Cu surface.

    MemoryContract Analysis
C0543_SEMとSIMによるCu表面.jpg

[Analysis Case] Comparison of Secondary Electron Images of Cu Surface Using SEM and SIM

C0543_SEMとSIMによるCu表面.jpg
C0543_SEMとSIMによるCu表面.jpg
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Analysis of LSI and memory.

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[Analysis Case] Comparison of Secondary Electron Images of Cu Surface Using SEM and SIM_C0543

[Analysis Case] Comparison of Secondary Electron Images of Cu Surface Using SEM and SIM_C0543

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一般財団法人材料科学技術振興財団 MST

一般財団法人材料科学技術振興財団 MST

Testing, Analysis and Measurement

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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