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  6. [Analysis Case] Observation of Crystal Grains on Cu Surface Using Scanning Ion Microscopy

[Analysis Case] Observation of Crystal Grains on Cu Surface Using Scanning Ion Microscopy

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last updated:Apr 02, 2026

一般財団法人材料科学技術振興財団 MST
一般財団法人材料科学技術振興財団 MST
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It is possible to obtain insights into the size and distribution of crystal grains in metallic polycrystals.

The Scanning Ion Microscope (SIM) is a method that irradiates a solid sample with an ion beam and detects the secondary electrons generated. Since secondary electrons produce contrast according to the crystal orientation of each grain, it is possible to easily obtain insights into the size and distribution of crystal grains in polycrystalline metals such as Cu and Al using SIM. This document presents an example of measurements where the surface of Cu was observed using SIM.

    MemoryContract Analysis
C0545_走査イオン顕微鏡によるCu表面の結晶粒観察.jpg

[Analysis Case] Observation of Crystal Grains on Cu Surface Using Scanning Ion Microscopy

C0545_走査イオン顕微鏡によるCu表面の結晶粒観察.jpg
C0545_走査イオン顕微鏡によるCu表面の結晶粒観察.jpg
  • Related Link - https://www.mst.or.jp/casestudy/c0545/
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Analysis of LSI and memory.

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[Analysis Case] Observation of Crystal Grains on Cu Surface Using Scanning Ion Microscopy_C0545

[Analysis Case] Observation of Crystal Grains on Cu Surface Using Scanning Ion Microscopy_C0545

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一般財団法人材料科学技術振興財団 MST

一般財団法人材料科学技術振興財団 MST

Testing, Analysis and Measurement

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MST is a foundation that provides contract analysis services. We possess various analytical instruments such as TEM, SIMS, and XRD to meet your analysis needs. Our knowledgeable sales representatives will propose appropriate analysis plans. We are also available for consultations at your company, of course. We have obtained ISO 9001 and ISO 27001 certifications. Please feel free to consult us for product development, identifying causes of defects, and patent investigations! MST will guide you to solutions for your "troubles"!

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