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  6. [Large Machinery Lathe Processing Example] Semiconductor Manufacturing Equipment Parts (Shower Plate)

[Large Machinery Lathe Processing Example] Semiconductor Manufacturing Equipment Parts (Shower Plate)

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last updated:May 17, 2019

深田工業
深田工業
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Aluminum products with a flatness of within 10 microns for Φ500!

This is a part for semiconductor manufacturing equipment. Material A6061, Φ500×t15 Processed with flatness of 10μm and parallelism of 20μm. The surface has several grooves of 0.5mm in width. We excel at high-quality, high-precision processing of large items like this! Of course, there are no scratches or fingerprints at all! Utilizing 3D CAD/CAM, we strive for high efficiency and high precision in processing. In particular, we specialize in processing parts for semiconductor manufacturing equipment and chambers for vacuum devices. We handle difficult-to-cut materials such as aluminum, stainless steel, iron, and titanium, regardless of quantity, shape, or material type. 【Features】 ■ Quick, careful, and precise processing ■ Capable of simultaneous 5-axis processing using CAD/CAM ■ Machining with a maximum workpiece size of over 2000mm × 800mm (width) ■ Compound 5-axis lathe with a maximum workpiece size of φ700mm ■ Specializing in processing parts for semiconductor manufacturing equipment ■ Capable of processing for chambers used in vacuum devices *For more details, please download the PDF document or feel free to contact us.

    Other machine elementsProcessing Contract
アルミΦ500半導体向け部品.JPG

[Large Machinery Lathe Processing Example] Semiconductor Manufacturing Equipment Parts (Shower Plate)

アルミΦ500半導体向け部品.JPG
アルミΦ500半導体向け部品.JPG
  • Related Link - http://www.fkd-works.jp/

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basic information

【Equipment】 ■ Gantry machining center ■ Vertical machining center ■ Multi-axis CNC lathe ■ Multi-function CNC lathe ■ General-purpose lathe ■ Contour machine ■ Broaching machine ■ 3D CAD/CAM software, etc. *For more details, please download the PDF document or feel free to contact us.

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Applications/Examples of results

[Processing Achievements] ■ General precision machining of mechanical parts such as chambers for vacuum devices ■ Manufacturing of components for radiation measurement devices ■ Creation of special parts for medical devices and research institutions

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Processing technology "Large Lathe Parts Processing"

Processing technology "Large Lathe Parts Processing"

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Fukada Industries Company Profile

Fukada Industries Company Profile

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深田工業

深田工業

Manufacturing and processing contract

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Fukada Kogyo Co., Ltd. is confident in precision machining of mechanical parts. All of our employees are young (around 30 years old), so they are highly motivated. We rarely refuse any type of machining work. We have operated under the spirit of "You won't know until you try, so let's give it a shot!" We are happy to work with difficult materials such as aluminum, stainless steel, iron, titanium, and castings, regardless of quantity, shape, or material type. If you are having trouble with part machining, please feel free to consult with us.

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