Macro observation of wafer surfaces is also possible! Desktop-type microscope loader compatible with 5 and 6-inch wafers.
The "SYAR112" is a microscope loader device consisting of a tabletop robot, an aligner, and a microscope XY stage. After extracting a designated wafer from the cassette, it centers and positions the notch or orientation flat using the aligner, and supplies it to the microscope XY stage. Additionally, it can record and store observation points and inspection results. 【Features】 ■ Macro observation of the wafer surface on the microscope XY stage ■ Equipped with a transmission mapping sensor ■ Arbitrary coordinate control via joystick ■ Acrylic cover and various interlocks included ■ Capable of recording and storing observation points and inspection results *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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【Application】 ■LED/MEMS/Power Device Field *For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."