Support for transporting 3rd generation glass substrates! Double-arm clean robot equipped with various sensors.
The "HR71000-1500" is a direct drive double-arm clean robot compatible with third-generation glass substrate transport. Both the arms and the vertical axis can achieve long strokes. It vacuum-suctions the backside of the substrate. The arms are equipped with stepping motors, while the pivoting vertical axis uses servo motors. 【Features】 ■ Dedicated command control via RS232C ■ Equipped with various sensors ■ Substrate holding: Vacuum suction on the backside of the substrate ■ Arms: Stepping motor specification for pivoting ■ Vertical axis: Servo motor specification *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■Arm ・Operating Range: 1000mm ・Transport Speed: 1000mm/1.2sec ・Resolution: 10.2539μm ■Swing ・Operating Range: 280 degrees ・Transport Speed: 180 degrees/2.5sec ・Resolution: Less than 0.001 degrees ■Up and Down ・Operating Range: 1500mm ・Transport Speed: 1500mm/2.5sec ・Resolution: Less than 0.1mm ■Transported Item: 24-inch glass substrate, thickness 1.1mm ■Repeatability: Within ±0.1mm ■Cleanliness: ISO Class 2 *For more details, please refer to the PDF document or feel free to contact us.
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【Usage】 ■FPD Field *For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."