Achieved further reduction in manufacturing costs by reducing the number of parts in conventional aluminum structures!
The "SV1240" is a single-arm clean robot that employs a magnetic fluid seal and a metal bellows method for its vacuum seal. By reducing the number of conventional aluminum structural components, further manufacturing cost reductions have been achieved. It uses a belt link system with a timing belt for arm drive. 【Features】 ■ Equipped with a 2-phase pulse motor with an encoder ■ RS232C communication control ■ Parallel I/O control ■ Adopts a magnetic fluid seal and metal bellows method for the vacuum seal ■ Belt link system using a timing belt for arm drive *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■Arm ・Operating Range: 718mm ・Transport Speed: 718mm/1.5sec ・Resolution: Below 0.0044mm ■Swing ・Operating Range: 330 degrees ・Transport Speed: 180 degrees/2.0sec ・Resolution: 0.00417 degrees ■Up and Down ・Operating Range: 20mm ・Transport Speed: 20mm/1.0sec ・Resolution: 0.000625mm ■Object to be transported: □190mm, thickness 3mm, aluminum tray ■Repeatability: Within ±0.1mm *For more details, please refer to the PDF document or feel free to contact us.
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【Usage】 ■ Semiconductor field *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."