Introducing a device that supports 6.8-inch SEMI standard wafers and allows for the selection of basic transfer patterns!
This product is a device that can accommodate both standard pitch cassettes and double pitch cassettes, allowing for interchange between them. The basic transfer patterns include options for same slot transfer, inverted slot transfer, and designated slot transfer. Additionally, as an option, it is possible to equip a slot designation recipe and a wafer ID reader. 【Features】 ■ Compatible with 6.8-inch SEMI standard wafers ■ Supports both standard pitch cassettes and double pitch cassettes ■ Allows for interchange between them ■ Optionally equipped with a slot designation recipe and a wafer ID reader *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Equipment】 ■Robot ■Alina ■Dual-size compatible cassette stage 2 port ■Control equipment (including basic transfer software) *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."