Introducing products compatible with 5, 6, and 8-inch wafers that use 2-phase stepping motors!
The "AA2000 Series" centers the wafer using a clamp made of polyacetal resin that grips the outer circumference of the wafer. It features a compact, clean body that enhances cleanliness. It supports RS232C communication control or I/O control. Additionally, it is compatible with 5, 6, and 8-inch wafers. For inquiries about this product, please feel free to contact Ateru Corporation. 【Features】 ■ Wafer centering: Grips the outer circumference of the wafer with a polyacetal resin clamp ■ Notch positioning: Adsorbs with a spindle and positions using a light sensor ■ Compact, clean body that enhances cleanliness ■ RS232C communication control or I/O control ■ Uses a 2-phase stepping motor *For more details, please refer to the PDF materials or feel free to contact us.
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Our company is developing, designing, and manufacturing inspection equipment for special wafers that cannot be inspected by conventional inspection devices, as well as laser marker combined inspection devices and various loaders, based on the clean transport technology we have cultivated over many years in the semiconductor manufacturing field. From both the perspective of accommodating special wafers and automating visual inspections, we are commercializing products that meet our customers' needs for "equipment that is necessary but not available anywhere."