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  5. Stepper
  6. Ultra High Power UV-LED Irradiator ALE/1C

Ultra High Power UV-LED Irradiator ALE/1C

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ALE/1C

last updated:Nov 20, 2019

ケイエルブイ
ケイエルブイ
  • Official site

Maximum 50W ultra-high output. LED irradiator as a replacement for mercury lamps. Usable for UV curing, semiconductor inspection equipment, and more.

This is a super high-output LED irradiation system that replaces conventional discharge lamps (mercury lamps). The ALE/1C is used by connecting two systems: the control system (CSS) and the exposure system (ESS). By splitting the system into two, we have achieved a compact design that is easy to integrate into equipment while maintaining high output. Additionally, the exposure system can be used in combination with various optical components such as light pipes and light guides. For a comparison of output between 1000W and 500W mercury lamps and the ALE/1Ct, please refer to the catalog.

    StepperOther semiconductor manufacturing equipment
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Ultra High Power UV-LED Irradiator ALE/1C

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  • Related Link - https://www.klv.co.jp/product/uv-irradiation-devic…

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basic information

Product Features - Ultra high output (up to 50 W) - High stability (output control via closed loop) - Low running costs (long lifespan with LED use: 10,000 hours) - Can be used as an alternative to mercury lamps - External cooling

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Applications/Examples of results

- Mask aligner - Stepper - Wafer peripheral exposure - UV curing - Inspection device using UV light source

Line up(3)

Model number overview
ALE/1.1
ALE/1.2
ALE/1.3

News about this product(1)

SEMICON Japan 2024 Exhibition

  • Seminar・Event

Event Date: December 11 (Wednesday) to December 13 (Friday), 2024 Venue: Tokyo Big Sight, East Exhibition Hall, Hall 7 Featured Products: - Mask aligners, peripheral exposure, high-output LED irradiation devices for steppers - Semiconductor surface inspection equipment - High-spectral camera capable of video recording - Compact spectrometer - LPP-EUV light source - Laser-excited white light source (190–2500nm) - Ultra-high sensitivity CCD camera for VUV and X-ray regions - Plasma source - SC light source (supercontinuum light source)

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ケイエルブイ

ケイエルブイ

Testing, Analysis and Measurement

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K.L.V. has been discovering cutting-edge optical components from around the world and supporting the development of various optical technologies, particularly in the fields of medicine, environment, and analysis. With the theme of "SOLUTION FOR OPTICAL SYSTEM DEMANDS," we are actively building and expanding our optical solution business. We aim to respond to our customers' increasingly sophisticated and diverse needs more quickly and accurately than anyone else, becoming a company that contributes to both business and society. As a "specialized trading company proposing the utilization of optical energy," we invite you to look forward to our unique and promising optical solutions that will pave the way for a new era of light.

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