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  6. Infrared microscope system "IR1300mea"

Infrared microscope system "IR1300mea"

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last updated:Feb 13, 2020

ディスク・テック 本社
ディスク・テック 本社
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Manual operation type! Each dimension of the interface of various silicone devices can be measured with clear images.

The "IR1300mea" is an infrared transmission and reflection microscope system that can measure the dimensions of various silicon device interfaces with clear images, thanks to its high-resolution infrared CMOS camera and image enhancement software. The focus axis has a long stroke, allowing for inspection and measurement of wafers while mounted on tall fixtures. 【Features】 - Equipped with linear scales on the X, Y, and Z axes for precise measurements outside the field of view. - Manual operation type for the X, Y, and Z axes. - Electric stage and electric focus can also be installed (optional). - The focus axis can be set to a long stroke, enabling wafer inspection and measurement while mounted on fixtures (long stroke up to 45mm). *For more details, please refer to the PDF document or feel free to contact us.

    Electron microscopeOther microscopes
2019-11-14_17h19_16.png

Infrared microscope system "IR1300mea"

2019-11-14_17h19_16.png
2019-11-14_17h19_16.png
  • Related Link - http://www.disctech.co.jp/IR-1300measure.htm

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basic information

【Device Configuration】 ■ Infrared microscope main unit with objective lenses 5x, 10x, 20x, 50x, (100x: optional) ■ Infrared camera with 1.3 million pixels ■ Inspection computer or laptop ■ User manual *For more details, please refer to the PDF document or feel free to contact us.

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【Purpose】 ■Measurement of various dimensions of interfaces in silicon devices *For more details, please refer to the PDF document or feel free to contact us.

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Infrared microscope system 'IR1300mea'

Infrared microscope system 'IR1300mea'

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ディスク・テック

ディスク・テック 本社

Industrial Electrical Equipment

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Disk Tech's image processing is provided by in-house optical engineers, laser engineers, hardware, software, and precision machinery engineers as a total solution. We handle inspection devices utilizing infrared technology, three-dimensional inspection devices, and more. Our proprietary infrared microscope has over 10 years of proven performance.

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