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  1. Home
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  4. Semiconductor Manufacturing Equipment
  5. Evaporation Equipment
  6. Simple experimental deposition device (EM-645 type)

Simple experimental deposition device (EM-645 type)

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EM-645S type

last updated:Dec 13, 2019

神港精機 東京支店
神港精機 東京支店
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Simple, compact, high-performance; ideal for experiments and basic research; flexibly customizable according to user needs; standard-type deposition device.

Covers all performance, cost, and technical support required for basic research, and can be customized according to individual requirements.

    Evaporation EquipmentOther physicochemical equipmentOther surface treatment equipment
簡易実験用蒸着装置.jpg

Simple experimental deposition device (EM-645 type)

簡易実験用蒸着装置.jpg
簡易実験用蒸着装置.jpg
  • Special site - Product/service details - https://pr.mono.ipros.com/shinko-seiki/product/

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basic information

A fully manual deposition system equipped with a standard dual-source resistance heating evaporation source. Flexible support for substrates ranging from Φ2 to 3-inch wafers to special substrates. Abundant options such as additional evaporation sources, simultaneous deposition, substrate cooling, and high-temperature heating mechanisms. Sample testing available with in-house demonstration equipment.

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Applications/Examples of results

Research for universities and public research institutions: compound semiconductor research and development, metal surface treatment, electronic materials research.

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Model number overview
AMF-850SPB Type This is a research and development front-door type deposition device equipped with an electronic gun, capable of forming films of high melting point metals and oxide films. It has a wealth of proven results, characterized by stable film formation performance and flexible customization options due to its rich array of optional features.

catalog(6)

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Catalog of Simple Experimental Sputtering Equipment

Catalog of Simple Experimental Sputtering Equipment

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Research and Development Sputtering Equipment Catalog

Research and Development Sputtering Equipment Catalog

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Plasma Etching Equipment Catalog

Plasma Etching Equipment Catalog

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Heat treatment device for electronic devices

Heat treatment device for electronic devices

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Standard Batch Type Deposition Equipment Catalog

Standard Batch Type Deposition Equipment Catalog

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Simple experimental sputtering device model SRV3100

Simple experimental sputtering device model SRV3100

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Company information

神港精機

神港精機 東京支店

Industrial Machinery

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Shinko Seiki, as a technology-driven manufacturer, leverages the numerous know-how accumulated particularly in the field of vacuum equipment to deliver innovative products that meet user needs. In recent years, the company has also been challenging cutting-edge fields such as electronics and new materials, aiming to develop truly valuable hardware and software through the advancement of distinctive technologies and their organic integration.

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