Introduction of wafer thickness measurement sensors for semiconductor in-process applications!
This document provides information about wafer thickness measurement sensors. We introduce the "CHRocodile 2 Series," which is suitable for replacement with contact gauges, as well as the design of optical measurement heads for in-process semiconductor applications. Please take a moment to read it. 【Contents】 ■ CHRocodile 2 Series ■ Design of optical measurement heads for in-process semiconductor applications ■ Advantage: Use of chromatic aberration confocal principle ■ Advantage: Use of spectral interference principle ■ Si thickness measurement data during wafer in-process *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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[Keywords: Applications, Measurement Items, Benefits, etc.] Non-contact sensors, optical sensors, confocal, spectral interferometry, thickness, thin films, thick films, height, step height, flatness, TTV, thickness measurement, thickness inspection, high speed, 3D, high precision, inline, monitoring, in-situ, during processing, before and after processing, polishing, semiconductors, semiconductor wafers, wafer bonding, Si wafers, Si, GaAs, InP, SiC, LiNbO3 (LN), LiTaO3 (LT), GaN, SiP, Al2O3 (sapphire), gloss, mirror finish, easy.
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Presitech is a specialist in laser material processing and optical measurement technology. We are not just a supplier of systems and components, but a professional partner in ensuring a smooth processing process for our customers. We offer consultations from the foundational stage and accurately consult with customers on their requests and objectives. We understand that the key to success in unique processing processes lies in the four components of exhibition, monitoring, processing, and control. Only by doing so can we provide appropriate solutions for our customers' applications. Our high-quality products, such as laser processing heads, quality monitoring systems, and optical measurement systems for spacing/thickness measurement, allow customers to directly benefit from our decades of experience. Our optical sensors are characterized by the highest precision and dynamic adaptability. Furthermore, they detect accurate values even in high-speed measurements.