Ultra-compact ozone water decomposition device "OZK-ISC001"

Decomposes ozone using ultraviolet irradiation and activated carbon. Active in semiconductor and liquid crystal manufacturing processes.

The "OZK-ISC001" is a compact ozone water decomposition device that integrates a control unit, a decomposition tower, and an activated carbon treatment tank. Ozone dissolved in the ozone water accumulated inside the tower is decomposed by ultraviolet light (254nm) entering from the IN side at the bottom of the decomposition tower. Furthermore, the decomposition of ozone is promoted in the activated carbon tank installed in the latter part of the decomposition tower. This product is used in semiconductor and liquid crystal manufacturing processes. 【Standard Specifications】 Decomposition Principle: Ultraviolet irradiation type + Activated carbon type Decomposed Liquid: Pure ozone water Decomposition Liquid Temperature: 20–50℃ (Ambient Temperature: 15–40℃, below 90% RH) Operating Pressure Range: 0.4 MPa or less Operating Flow Rate: 20 L/min or less (depending on conditions) Concentration after Decomposition: 5 ppm or less (depending on conditions) *For more details, please refer to the materials. Feel free to contact us with any inquiries.

Separation device