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  4. Semiconductor Manufacturing Equipment
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  6. Ozone water generator

Ozone water generator

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last updated:Feb 13, 2026

ダルトン
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Custom proposals are possible by incorporating an ozone water generation device into a substrate cleaning system tailored to specific applications.

<Features> 〇 Adopts a circulation method - Extremely low amounts of stagnant and waste water - Rapid concentration buildup (generates ozone water in 1 minute) - Stable ozone water concentration and flow during the cleaning process 〇 Metal-free ozone water - Generates ozone water suitable for precision cleaning through proprietary technology 〇 Supports a wide range of applications - Wide adaptability with concentrations from 1 to 100 ppm and flow rates from 1 to 50 L/min - Generators and mixers can be used individually

    Other semiconductor manufacturing equipment
ozon_main.png

Ozone water generator

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Applications/Examples of results

<Uses> - Removal of resist residues - Surface protective oxide film - Removal of organic substances - Removal of metal impurities - Organic film etching - Removal of fine particles - Pipe cleaning - Sterilization

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Industrial Machinery

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Walking hand-in-hand with customers, challenging for creation of new values across a wide range of fields– DALTON’s existence, with the dual business domains of laboratory equipment and industrial machinery, truly shines as we play the role of a partner to customers who have strong passion for creating new values. A long with our unique group firms and suppliers, we have built a long history of trust with our customers who’ve been the main players to create new values insociety. -Creating new values together.- Dalton Group are pooling our knowledge and technology together, merging it with our customers’creative endeavors to create new and innovative values that contribute to an affluent society and abright future.

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