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  6. In-process measurement of wafer step height

In-process measurement of wafer step height

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last updated:Mar 30, 2022

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The "CHRocodile 2 DPS color aberration confocal sensor" is equipped with two independent measurement channels.

In grinding operations, it is necessary to adjust the thickness of the wafer during processing. If using a non-contact, non-destructive optical measurement method, the thickness of the wafer can be monitored during processing without applying stress to the workpiece or damaging it, making it a suitable solution. Our "CHRocodile 2 DPS Chromatic Aberration Confocal Sensor" is equipped with two independent measurement channels. The sensor processes two chromatic aberration probes and synchronizes measurements and outputs in real-time, providing the final height and thickness of the wafer. 【Features】 ■ Development of chromatic aberration probes for harsh environments based on over 10 years of know-how in CMP and grinding interference measurement. ■ Non-contact measurement of wafer thickness in harsh environments. ■ Data acquisition rate of 10 kHz per probe. *For more details, please refer to the PDF document or feel free to contact us.

    Sensors
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In-process measurement of wafer step height

2020-01-16_13h45_34.png
2020-01-16_13h45_34.png 2020-01-16_13h45_37.png 2020-01-16_13h45_41.png
  • Related Link - https://www.precitec.de/jp/products/optical-measur…
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[Keywords: Applications, Measurement Items, Benefits, etc.] Non-contact sensors, optical sensors, confocal, thickness, thin films, thick films, gaps, height, measurement, inspection, high speed, high precision, inline, monitoring, in-situ, during processing, before and after processing, polishing, semiconductors, wafers, wafer bonding, Si wafers, Si, GaAs, InP, SiC, LiNbO3 (LN), LiTaO3 (LT), GaN, SiP, Al2O3 (sapphire), dicing grooves, flip chips, transparent, transparent bodies, black, glossy, mirror finish, simple.

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In-process measurement of wafer step height

In-process measurement of wafer step height

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Solutions for Semiconductor Pretech Products_20220628

Solutions for Semiconductor Pretech Products_20220628

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Case Study Collection: Thickness Measurement and 3D Shape Measurement of Semiconductor Wafers Using Non-Contact Sensors

Case Study Collection: Thickness Measurement and 3D Shape Measurement of Semiconductor Wafers Using Non-Contact Sensors

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Doppler wafer measurement - High-speed and high-precision measurement using a non-contact optical sensor.

Doppler wafer measurement - High-speed and high-precision measurement using a non-contact optical sensor.

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The 1st Kyushu Semiconductor Industry Exhibition

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We will be exhibiting at the Kyushu Semiconductor Industry Exhibition held at Marine Messe Fukuoka on September 25 (Wednesday) and September 26 (Thursday), 2024. If you are interested, please come to the venue. ■ Products to be exhibited - Spectral interference optical thickness sensor CHRocodile 2 DW/2IT - Chromatic aberration confocal optical line sensor CLS2.0 - Chromatic aberration confocal optical single-point sensor CHRocodile 2S, C, Mini *This time, there will be no actual display of the FSS for 12" wafer thickness mapping measurement, but if you need an explanation or would like to request a demo, please come to our booth.

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プレシテック・ジャパン

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Testing, Analysis and Measurement

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Presitech is a specialist in laser material processing and optical measurement technology. We are not just a supplier of systems and components, but a professional partner in ensuring a smooth processing process for our customers. We offer consultations from the foundational stage and accurately consult with customers on their requests and objectives. We understand that the key to success in unique processing processes lies in the four components of exhibition, monitoring, processing, and control. Only by doing so can we provide appropriate solutions for our customers' applications. Our high-quality products, such as laser processing heads, quality monitoring systems, and optical measurement systems for spacing/thickness measurement, allow customers to directly benefit from our decades of experience. Our optical sensors are characterized by the highest precision and dynamic adaptability. Furthermore, they detect accurate values even in high-speed measurements.

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