Mirror projection mask aligner, a unit that enables double-sided exposure with contact aligners.
The "Backside Alignment System (IRAS)" is a unit that allows for the alignment of the backside of wafers by being mounted on MPA and PLA. It is designed for using MPA and PLA as backside exposure devices. It is suitable for users considering the purchase of a new backside exposure device. Please feel free to contact us if you have any inquiries. 【Overview】 ■ Main Additional Components - CCD camera for mask alignment - Near-infrared CCD camera for backside wafer alignment - Monitor and computer for image analysis - Backside camera unit stage - Others ■ Compatible Models: MPA600 Series, PLA Series ■ Installation Period: 1.5 weeks ■ Near-infrared specifications are also available * For more details, please download the PDF or contact us.
Inquire About This Product
basic information
For more details, please download the PDF or contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please download the PDF or contact us.
catalog（1）
Download All Catalogs
Company information
Our company specializes in the reuse and renewal of semiconductor manufacturing equipment and related products. We offer services such as MPA services, back-side alignment systems (IRAS), PLA services, SEM services, and WJ services. Please feel free to contact us if you have any inquiries.