Process technology: Hydrofluoric acid and nitric acid treatment equipment

It is equipment capable of simultaneously neutralizing hydrofluoric acid, nitric acid, and nitrogen oxides.

The hydrofluoric acid and nitric acid treatment equipment is designed to process waste gases containing hydrofluoric acid, nitric acid, and nitrogen oxides emitted from semiconductor manufacturing and solar cell manufacturing businesses. This equipment consists of an alkaline scrubber for removing hydrofluoric acid and nitric acid, a catalytic reaction tower for reducing nitrogen oxides, and a gas heater to heat the waste gas to a temperature suitable for catalytic reactions. The packing material for the alkaline scrubber uses MIRAX, which offers superior performance compared to conventional random packing, allowing for a more compact design than existing equipment. 【Features】 ■ Compatible with various concentrations of harmful gases ■ Effective utilization of waste heat ■ Low energy consumption ■ Control measures to prevent leakage of ammonia in the treated gas, considering the surrounding environment *For more details, please refer to the PDF materials or feel free to contact us.

Gas recovery/treatment equipment