Beam energy 100 to 2,000 eV! Uniform long ion beam with innovative magnetic circuit design.
The "ELBS-150" is a line beam ion source of the ECR (Electron Cyclotron Resonance) discharge type that can be applied to reactive ion beam milling equipment. It features high-power microwave drive with a newly developed large coaxial input terminal (7/16 type). It can be applied to milling of magnetic heads and trimming adjustments of high-frequency circuits. 【Features】 - Uniform long ion beam due to innovative magnetic circuit design - High-power microwave drive with newly developed large coaxial input terminal (7/16 type) - Dielectric lining that is metal contamination-free - Newly developed long-life beam electrode *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Device Specifications】 ■ Beam Size: Width 150mm ■ Beam Energy: 100 to 2,000 eV ■ Beam Current Density: Maximum 10 mA/cm² ■ Connection Coaxial Connector Standard: DIN 7/16 ■ Compatible Microwave Frequency: 2.45 GHz ■ Maximum Microwave Power: 500 W ■ Cooling Method: Water Cooling *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Application Examples】 ■High-speed milling formation of MEMS structures ■Milling processing of magnetic heads ■Trimming adjustment of high-frequency circuits, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Company information
Noberion Systems Co., Ltd. is a company that develops and manufactures plasma application devices and offers contract processing for special film deposition processes. As a technology development-oriented venture company, it is advancing the development of ECR (Electron Cyclotron Resonance) high-density plasma sources and ECR high-current ion beam sources to meet new technological needs using oxygen and various active gases.
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