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  1. Home
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  3. Scientific and Physics Equipment
  4. Surface Treatment Equipment
  5. Plasma surface treatment equipment
  6. Hybrid hard film coating device (DLC-CVD + PVD device)

Hybrid hard film coating device (DLC-CVD + PVD device)

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last updated:Apr 13, 2020

神港精機 東京支店
神港精機 東京支店
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Composite coating device for CVD-DLC and hard film PVD. Smooth surface PVD film + high-rate DLC. Hardness + tribological thin film.

A high-density sputter cathode ADM system (arc discharge type magnetron sputtering cathode) has been added to the well-established PIG-type DLC coating equipment for automotive DLC films. A hard alloy film is laminated onto the DLC film, which has excellent tribological properties, achieving a new hard coating with a smooth surface. The conventional DLC film has also been enhanced with the new cathode's functions, improving performance. Adhesion and resistance to surface pressure can be easily improved. Of course, the conventional PIG-type DLC coating equipment can be upgraded with additional functions. The latest model of the new functional hard film coating equipment can fully demonstrate the performance of CVD/PVD alone.

    Other machine toolsOther processing machinesPlasma surface treatment equipment
ハイブリッド硬質膜コーティング装置.jpg

Hybrid hard film coating device (DLC-CVD + PVD device)

ハイブリッド硬質膜コーティング装置.jpg
ハイブリッド硬質膜コーティング装置.jpg
  • Special site - Product/service details - https://pr.mono.ipros.com/shinko-seiki/product/

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basic information

The basic structure of the PIG-type DLC coating device has been enhanced by adding two arc discharge magnetron sputtering cathodes. It is capable of stacking hard nitride and oxynitride films. Furthermore, it achieves new functional hard films by layering smooth DLC substrates at the nano level and other hard films. It can be effectively utilized for both hard films and solid lubrication films. A hard film coating device that supports new functions and multiple applications.

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Automotive parts coating Mold and cutting tool coating

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Hard film coating device "Arc discharge type magnetron sputtering device"

Hard film coating device "Arc discharge type magnetron sputtering device"

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PIG-type DLC coating equipment

PIG-type DLC coating equipment

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Hard film sputtering device STL5521 type

Hard film sputtering device STL5521 type

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ALN coating device (arc discharge type magnetron sputtering device)

ALN coating device (arc discharge type magnetron sputtering device)

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Hydrogen-free DLC coating device (high-density sputtering ADMS device)

Hydrogen-free DLC coating device (high-density sputtering ADMS device)

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Company information

神港精機

神港精機 東京支店

Industrial Machinery

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Shinko Seiki, as a technology-driven manufacturer, leverages the numerous know-how accumulated particularly in the field of vacuum equipment to deliver innovative products that meet user needs. In recent years, the company has also been challenging cutting-edge fields such as electronics and new materials, aiming to develop truly valuable hardware and software through the advancement of distinctive technologies and their organic integration.

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