Chiller for fluorine-based solutions with high temperature stability and responsiveness.
Fluorinated solvents (Fluorinert, Novec, Galden, OptiOn) have a high level of insulation, making them very effective in preventing electrolysis and facilitating easy maintenance of equipment. Additionally, they are non-flammable and have high safety, making them suitable for cooling equipment in clean rooms. (Features of fluorinated solvents) - High electrical insulation - High thermal conductivity - High thermal stability - High chemical stability and inertness - Low toxicity and high safety due to non-flammability
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basic information
<Features> - Compatible with fluorinated solvents such as Fluorinert (FC-3283), Novec (HFE-7100, HFE-7200), and Galden (HT-200), Optreon (SF10) - With a tank capacity of only 1.9L, the usage of expensive liquids is minimized - Sealed structure makes it difficult for expensive liquids to evaporate - Equipped with a high-lift pump with a discharge pressure of 0.4MPa or more - Operating temperature range of -15°C to +35°C, suitable for low temperatures - High temperature stability and responsiveness due to the hot gas bypass method - Compliant with CE, UL, and KC-Mark standards
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Applications/Examples of results
<Application> - Dry etching - Tester - Stepper - Electromagnet - Electron beam - Laser device
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Company information
MS Equipment is a specialized trading company with approximately 50 years of experience in the chiller business, serving as the exclusive agent in Japan for NESLAB, a leading chiller manufacturer in the world (now Thermo Fisher Scientific). We have a proven track record of delivering over 20,000 chillers. Since 2014, we have started handling Peltier-type chillers from Solid State Cooling Systems in the United States, providing products that meet the needs of customers sensitive to environmental and energy issues. ISO 14001:2004: JQA-EM4217, ISO 9001:2000: JQA-QMA12892