Tabletop-sized autofocus maskless aligner
The tabletop system's maskless aligner µMLA features cutting-edge maskless technology and is an entry-level drawing device suitable for all research and development areas requiring fine structures. Typical applications include microfluidics, microoptics, sensors, MEMS, and materials science. The µMLA (Micro M L A) is a state-of-the-art maskless exposure device that is more economical and offers superior customizable flexibility compared to previous tabletop direct writing devices.
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basic information
Drawing area: 5 mm to 100 mm square (optional expansion to 125 mm square) Minimum shape dimension: minimum 0.6 µm (minimum dimensions of 1 µm and 3 µm lens sets available) Real-time autofocus system (standard: pneumatic, optional: optical) User-friendly operating software Many options available: field alignment, vector mode, draw mode, speed enhancement, dedicated table. Keywords: laser exposure device, direct drawing device, maskless drawing device.
Price range
P7
Delivery Time
Applications/Examples of results
Microstructures such as circuits, microfluidics, micro-optics, sensors, MEMS, and materials science.
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Company information
Heidelberg Instruments, Inc. is the Japanese subsidiary of Heidelberg Instruments Mikrotechnik, a German company that develops and manufactures laser direct writing systems and mask writing systems. We provide sales and technical services for laser direct writing systems within Japan. We offer a wide range of products, including laser writing systems and maskless aligners. For anything related to laser lithography, please feel free to consult with us.