A compact mass spectrometer (gas analyzer) equipped with all functions, perfect for in-situ monitoring of complex processes!
The INFICON CPM Compact Process Monitor is a compact mass spectrometer (gas analyzer) equipped with all functions, making it ideal for in-situ monitoring of complex processes. Additionally, the dried exhaust system utilizes the proven technology of the INFICON Transpector system to achieve an even higher level of performance.
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basic information
- A mass spectrometer based on a quadrupole for complex process monitoring - Continuous monitoring for 365 days achieves productivity improvement and cost reduction - Compact and affordable, making it installable in any low vacuum chamber - Performance enhanced by the new HexBlockTM sampling system - CDG adopted for process pressure monitoring and vacuum interlock - Calibration reference gas cylinders available as an option - Long-life frozen ion source enables detection of sub-ppm level contaminants, compatible with corrosive and reactive gases - Lightweight and easy to move
Price range
P6
Delivery Time
Applications/Examples of results
【Environmental Field】 - Analysis under atmospheric pressure - VOC and combustion gas analysis 【Medical and Healthcare Field】 - Breath analysis (real-time) - Analysis in drug discovery 【Industrial Products Field】 - Vacuum process analysis - Impurity analysis from materials - Analysis of catalytic reactions
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Company information
At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.