Improvement of MTBF and reduction of running costs achieved with the new sensor design!
The "Transpector MPH" is a high-performance residual gas analyzer (mass spectrometer) designed to eliminate process defects, improve yield, and reduce equipment downtime. It features a completely redesigned RGA ion source, incorporating an assembly of two filaments combined with an anode, cathode, and repeller electrodes. The dual filament design, using both main and backup filaments, allows for prolonged sensor use and helps avoid critical system failures. Additionally, the ability to select filaments suitable for specific applications ensures that filament lifespan is not shortened due to the process. 【Features】 ■ Ultra-fast data collection at 1.8 ms per point ■ Standard calibrator (optional) ■ TCP/IP Ethernet connectivity ■ Dual filaments (2) ■ Field-replaceable secondary electron multiplier *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ Filament kit combining anode, cathode, and repeller electrodes ■ Minimization of installation space with a compact sensor ■ 9-digit dynamic range ■ MDPP (Minimum Detectable Partial Pressure) is <2.7E-13Pa (100amu) ■ Improved S/N ratio ■ No matching required between sensor and control unit (SCU) ■ Assembly and inspection in a clean room environment, and double packaging for shipping ■ Compliant with RoHS *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.
