Achieving industry-leading data collection speed, minimal detection pressure, and S/N ratio!
The "Transpector MPS&MPH" achieves industry-leading data collection speed, minimal detection partial pressure, and S/N ratio. Inficon, a world leader in the field of Residual Gas Analyzers (mass spectrometers), offers standard and high-performance RGAs suitable for your vacuum applications. 【Features】 ■ Ultra-fast data collection ■ TCP/IP Ethernet connection ■ Dual filament ■ Filament kit integrating anode, cathode, and repeller ■ Compatible sensors and electronics units (no matching required) ■ Minimization of installation space *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Specifications】 ■Mass range: 100, 200, 300 amu ■Detector type: FC/EM ■Ionization energy: 70 eV ■Filament: Y203-Ir dual filament (Tungsten: optional) ■Sensitivity: 4.5 x 10^-6 A/Pa (MPH100: FC) ■Minimum detectable pressure: 2.7 x 10^-13 Pa (MPH100: EM) ■Minimum detection speed: 1.8 msec (analog scan or selected peak mode) ■Operating temperature: 200℃ (FC), 150℃ (EM) ■Baking temperature: up to 300℃ sensor only ■Communication: TCP/IP Ethernet ■Software: FabGuard Explorer (compatible with Windows XP, 7, 8.1, 10) *For more details, please refer to the PDF document or feel free to contact us.
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【Applications】 ■ High-precision mass spectrometry for UHV (gas analysis) ■ Surface analysis (outgassing) ■ Vacuum processes for semiconductor devices ■ Trace mass analysis (trace gas analysis) ■ Leak testing, etc. *For more details, please refer to the PDF document or feel free to contact us.
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Company information
At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.
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