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  6. Thin Film Evaluation Device "Spectroscopic Ellipsometer"

Thin Film Evaluation Device "Spectroscopic Ellipsometer"

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last updated:Dec 17, 2020

日本セミラボ 新横浜本社
日本セミラボ 新横浜本社
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[Demo available] Evaluation of the composition ratio of compound semiconductor materials is also possible! Accurately measure the thickness of thin films, including epitaxial films, non-contact and non-destructively.

The "spectroscopic ellipsometer" is a thin film evaluation device that accurately measures the thickness, refractive index, and extinction coefficient of thin films, including epitaxial films, in a non-contact and non-destructive manner. It is also capable of evaluating the composition ratios of compound semiconductor materials. The main evaluation and measurement items are the "thickness of thin films," "epitaxial film thickness," "refractive index," "extinction coefficient," "composition ratio of compound semiconductors," and "dopant concentration." 【Main Evaluation and Measurement Items】 ■ Thickness of thin films ■ Epitaxial film thickness ■ Refractive index, extinction coefficient ■ Composition ratio of compound semiconductors ■ Dopant concentration Please feel free to contact us for information on the specifications and pricing of the device. *Demonstrations are also possible. If you wish to request a demonstration, please indicate "Request for Demo" using the contact button below.

    Coating thickness gaugeAnalytical Equipment and DevicesSpectroscopic Analysis Equipment
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Thin Film Evaluation Device "Spectroscopic Ellipsometer"

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  • Related Link - https://www.semilab-j.jp/

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Thin Film Evaluation Device "Spectroscopic Ellipsometer"

Thin Film Evaluation Device "Spectroscopic Ellipsometer"

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[Technical Data] Measurement Principle of Spectroscopic Ellipsometry - What is Polarization? *Data Available

[Technical Data] Measurement Principle of Spectroscopic Ellipsometry - What is Polarization? *Data Available

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日本セミラボ

日本セミラボ 新横浜本社

Electronic Components and Semiconductors

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Semilab is a comprehensive measurement device manufacturer that supports research and manufacturing of cutting-edge technologies worldwide. We handle non-contact CV measurement devices, lifetime measurement devices, spectroscopic ellipsometers, photoluminescence, DLTS systems, sheet resistance measurement devices, nanoindenters, AFM, and more for the inspection of semiconductor wafers and devices. Please feel free to contact us for specifications and pricing of our devices.

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