Achieved over six times the brightness of conventional excimer lamps through the design of new development lamp units!
The "High-Power Excimer UV Irradiation Unit" is an industrial light source that contributes to reducing tact time through powerful vacuum ultraviolet light (172nm) with a lamp surface illuminance of 300mW/cm² or more. It requires fewer lamps, helping to save space. Additionally, it is possible to minimize power consumption with intermittent lighting. 【Features】 ■ Contributes to reducing tact time ■ Minimizes power consumption with intermittent lighting ■ Allows for low-temperature processing of workpieces due to single wavelength *For more details, please download the PDF or feel free to contact us.
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basic information
【Specifications】 ■Wavelength: 172nm ■Illuminance: 300mW/cm² or more (at a distance of 0mm) ■Axial Direction Uniformity: ±10% or less ■Lifespan: 2,000 hours (maintaining illuminance rate of 70% or more, defined as 100% at 100 hours) ■Effective Emission Length: 120 to 1,540mm ■Cooling: Water-cooled *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Dry cleaning and ashing of semiconductors and LCD substrates Surface modification of rubber rollers, silicon sheets, etc. *For more details, please download the PDF or feel free to contact us.
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In our Industrial Device Division, we offer a wide range of "industrial light sources and modules" used in various fields and manufacturing processes for industrial applications such as curing, sterilization, drying, and heating, covering the ultraviolet to infrared spectrum. We will contribute to the development of society and industry by providing light sources that enhance the value of our customers' products, as well as light sources and modules that improve production efficiency and product quality.
