Technical documentation for 0.2% BeCu alloy technology achieving low gas emissions and low temperature.
A vacuum structural material that breaks conventional wisdom: 0.2% BeCu alloy. Achieving low gas emission and low temperature! A substitute for stainless steel.
When it comes to vacuum structural materials, stainless steel and titanium are common, but they have a very high absorption rate for thermal radiation (from infrared to visible light) and are metals that do not conduct heat well. As a result, once heat is absorbed, it does not easily escape, causing the temperature of vacuum chambers and flanges to rise, which leads to a significant increase in gas release. Beryllium copper, on the other hand, has an extremely high thermal conductivity and a low thermal emissivity, which prevents it from reaching high temperatures and greatly reduces gas release. Additionally, by incorporating beryllium, it becomes harder, allowing for the use of copper gaskets, making it a suitable material for use in ultra-high vacuum conditions.
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【Features】 ■Improved achievable vacuum ■Copper surface is passivated with NiP ■Capable of baking up to 300°C ■Copper gaskets can be used
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When it comes to vacuum structural materials, stainless steel and titanium are common, but they have a very high absorption rate for thermal radiation (from infrared to visible light) and are metals that do not conduct heat well. As a result, once heat is absorbed, it does not easily dissipate, leading to an increase in temperature of vacuum chambers and flanges, which in turn causes a significant problem of gas release. Beryllium copper, on the other hand, has an extremely high thermal conductivity and a low thermal emissivity, which prevents it from becoming too hot and greatly reduces gas release. Additionally, by incorporating beryllium, it becomes harder, allowing for the use of copper gaskets, making it a suitable material for use in ultra-high vacuum conditions.
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At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.