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  6. Are you having trouble with gas release from the inner walls of the vacuum chamber?

Are you having trouble with gas release from the inner walls of the vacuum chamber?

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last updated:Apr 05, 2023

東京電子
東京電子
  • Official site

Here is the answer! We will introduce solutions and examples for gas release in vacuum chambers!

A new vacuum structural material that significantly reduces gas release from the inner walls by using BeCu alloy instead of the conventional stainless steel used in vacuum systems! BeCu alloy has a low emissivity and excellent thermal conductivity, allowing it to quickly dissipate even the slight heat it absorbs, thereby reducing the gas release speed to less than 1/10 by suppressing temperature rise. 【Features】 ■ Significantly reduces gas release in vacuum systems ■ Improves achieved vacuum ■ Copper surface is passivated with NiP ■ Capable of baking up to 300°C ■ Copper gaskets can be used *For more details, please refer to the materials available for download in PDF format or feel free to contact us.

    Vacuum Equipment
IPROS58899462799063934705.png

Are you having trouble with gas release from the inner walls of the vacuum chamber?

IPROS58899462799063934705.png
IPROS58899462799063934705.png

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basic information

In addition to this, our company offers a variety of ultra-high vacuum products, including the "Ultra High Vacuum Gauge 3B-Gauge" and the "Ultra Low Gas Emission Residual Gas Analyzer WATMASS." *For more details, please feel free to contact us.*

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Current challenges and expanding applications in mass spectrometry.

Current challenges and expanding applications in mass spectrometry.

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東京電子

東京電子

Industrial Electrical Equipment

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At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.

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Ultra High Vacuum (XHV) products "Magic Nipple / Cube / Chamber"
Significantly reduces gas release from the inner wall of the vacuum chamber! New "vacuum structural material."
Manufacturing and processing machinery
Significantly reduces gas release from the inner wall of the vacuum chamber! New "vacuum structural material."
Technical documentation for 0.2% BeCu alloy technology achieving low gas emissions and low temperature.
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Technical documentation for 0.2% BeCu alloy technology achieving low gas emissions and low temperature.
Low gas emission vacuum structural material '0.2% BeCu'
Materials
Low gas emission vacuum structural material '0.2% BeCu'

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