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  6. Significantly reduces gas release from the inner wall of the vacuum chamber! New "vacuum structural material."

Significantly reduces gas release from the inner wall of the vacuum chamber! New "vacuum structural material."

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last updated:Sep 07, 2022

東京電子
東京電子
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Made of 0.2% BeCu alloy for low gas emission! An alternative to stainless steel.

The "Magical Nipple/Cube/Chamber" uses BeCu alloy as a material, replacing the stainless steel traditionally used in vacuum systems, significantly reducing gas release from the inner walls with a new vacuum structural material. BeCu alloy has a low emissivity and excellent thermal conductivity, allowing it to quickly dissipate even a small amount of absorbed heat, thereby reducing the gas release speed to less than 1/10 by suppressing temperature rise. 【Features】 ■Improved ultimate vacuum ■Copper surface is NiP passivated ■Capable of baking up to 300°C ■Copper gaskets can be used *For more details, please refer to the materials available for download in PDF format or feel free to contact us.

    Vacuum EquipmentOther semiconductor manufacturing equipment
1118_tokyo-denshi_550_550_7.jpg

Significantly reduces gas release from the inner wall of the vacuum chamber! New "vacuum structural material."

1118_tokyo-denshi_550_550_7.jpg
1118_tokyo-denshi_550_550_7.jpg

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basic information

In addition to this, our company offers a wide range of ultra-high vacuum products, including the "Ultra High Vacuum Gauge 3B-Gauge" and the "Ultra Low Gas Emission Residual Gas Analyzer WATMASS." *For more details, please feel free to contact us.*

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*For more details, please refer to the materials. Feel free to contact us as well.*

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A vacuum structural material with 0.2% BeCu alloy that breaks conventional wisdom.

A vacuum structural material with 0.2% BeCu alloy that breaks conventional wisdom.

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Magical Nipple / Cube / Chamber Product Information

Magical Nipple / Cube / Chamber Product Information

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0.2% BeCu alloy chamber

0.2% BeCu alloy chamber

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Measuring limits and analyzing extremes 【Tokyo Electron Online EXPO】 Open!

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The Tokyo Electron Online Expo hosted by Tokyo Electron is now open! We are showcasing gas analyzers and new vacuum structural materials. Please feel free to stop by.

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東京電子

東京電子

Industrial Electrical Equipment

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At Tokyo Electron Limited, we have developed a variety of vacuum gauges and control equipment that boast precision, reliability, and durability through our expertise in electronics and precision machinery. The concept of "vacuum" is a foundational technology for our lives and industries, impacting fields ranging from the IT industry to electronics, food and healthcare, as well as the development of new materials and the manufacturing of essential goods. Therefore, our business is centered on accurately and flexibly responding to the diverse demands of our clients across various fields. For the betterment of modern industry, tomorrow, and the future, we continue our activities today with the hope that our technology and products related to "vacuum" will become a "true sky" that spreads over people's happiness, just like a clear blue sky.

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Related Products from 東京電子

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Technical documentation for 0.2% BeCu alloy technology achieving low gas emissions and low temperature.
Materials
Technical documentation for 0.2% BeCu alloy technology achieving low gas emissions and low temperature.
Are you having trouble with gas release from the inner walls of the vacuum chamber?
Machinery Parts
Are you having trouble with gas release from the inner walls of the vacuum chamber?
Low gas emission vacuum structural material '0.2% BeCu'
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Low gas emission vacuum structural material '0.2% BeCu'

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