Measuring limits and analyzing extremes 【Tokyo Electron Online EXPO】 Open!

Made of 0.2% BeCu alloy for low gas emission! An alternative to stainless steel.

The "Magical Nipple/Cube/Chamber" uses BeCu alloy as a material, replacing the stainless steel traditionally used in vacuum systems, significantly reducing gas release from the inner walls with a new vacuum structural material. BeCu alloy has a low emissivity and excellent thermal conductivity, allowing it to quickly dissipate even a small amount of absorbed heat, thereby reducing the gas release speed to less than 1/10 by suppressing temperature rise. 【Features】 ■Improved ultimate vacuum ■Copper surface is NiP passivated ■Capable of baking up to 300°C ■Copper gaskets can be used *For more details, please refer to the materials available for download in PDF format or feel free to contact us.

• Vacuum Equipment
• Other semiconductor manufacturing equipment

From trace gas analysis to atmospheric pressure sampling, a mass spectrometer equipped with high-performance models as an upgraded analytical device for both standalone measurements and systems!

We would like to introduce the lineup of Tokyo Electric, which enables diverse mass spectrometry. Specifically, the following types of mass analysis will be possible. 【Features】 ■ Ultra-trace gas analysis at E-15 Pa·m3/sec ■ High-precision mass analysis at E-13 Pa range under ultra-high vacuum ■ High-precision measurement of elements and compounds ■ Real-time analysis at atmospheric pressure (such as exhaled air and combustion gases) *For detailed mechanisms of diverse and high-precision mass analysis, please download the PDF for more information.

• Analytical Equipment and Devices

Significant reduction in gas emissions due to low-cost power consumption and cooling of the ion source! XHV gas analysis, which is difficult to measure with a typical quadrupole residual gas analyzer, is now possible!

"WATMASS" is an ultra-low gas release residual gas analyzer (mass spectrometer) that has improved its ion source to perform high-precision residual gas analysis in the range of 10^-7 to 10^-13 Pa. By adopting a thermal cathode ion source and a sensor nipple tube (ICF70) made of 0.2% BeCu with low radiation and high thermal conductivity, it significantly reduces gas release through low power consumption and cooling of the ion source. Additionally, by manufacturing the grid from a platinum-iridium (Pt-Ir) alloy, it reduces ESD gas release. A thorough low gas treatment using an electric furnace eliminates hydrogen emissions and forms a Be oxide layer. 【Application Examples】 ■ High-precision mass analysis in XHV/UHV ■ Surface analysis ■ Degradation and gas release of semiconductor devices ■ Gas analysis (mass spectrometry) generated by light stimulation and electron stimulation ■ Trace gas analysis (TDS/Out Gas) ■ Mass analysis of sealed devices/MEMS and leak testing at the level of 10^-17 Pa·m³/s ■ Helium permeability testing of glass and microbubble gas analysis *For more details, please refer to the PDF materials or feel free to contact us.

• Food Testing/Analysis/Measuring Equipment
• Analytical Equipment and Devices
• others

Fukuda Corporation has been pursuing leak detection for 60 years and is dedicated to advancing the future of leak testing. 【 Supporting Various Leak Tests: Air Leak Test / Gas Leak Test (Hydrogen Gas, Helium Gas) 】 We develop, manufacture, and sell leak testing equipment to inspect airtightness and sealing performance. We will propose suitable testers and devices for each inspection target. 【 Target Industries and Examples of Inspection Targets 】 - Automotive Industry: Engines, FC components, valves and piping, various parts - Electronic Components Industry: Smartphones, keyless switches, various small sensors - Pharmaceuticals / Food / Cosmetics Industry: Bottle containers, syringes, vials, eye drop containers, pillow packaging, PTP packaging We will propose the most suitable leak testers for each industry. 【 ISO Certification 】JIS Q 9001:2015 (ISO 9001:2015)

This is a collection of links to Fukuda's technical columns. It covers various topics related to leak tests and more... Please check the related links for more information.

At construction sites, temporary parking lots may be established for workers and construction-related vehicles. On unpaved ground, mud and ruts can easily occur due to rain, which may hinder vehicle access. Hyper CLT mats are civil engineering materials that utilize wood CLT. By laying them in temporary parking lots, a suitable environment for vehicle passage and parking can be created while protecting the ground. They can be laid only in the necessary areas, and after the construction is completed, they can be removed and repurposed for temporary roads or access routes. The 5×10 panels weigh approximately 230 kg, and the 5×20 panels weigh about 460 kg, making them lightweight and easy to install and remove even with small machinery, allowing for changes in parking space. Additionally, they offer benefits unique to wood, such as glare reduction, noise reduction, and CO2 fixation. They are registered as a technology with the Ministry of Land, Infrastructure, Transport and Tourism under NETIS as "TH-250021-A," and can be utilized for the development of temporary parking lots and innovative public works.

Metal cracks are one of the concerns in equipment maintenance operations. Conventional welding repair methods can change the base material around the crack due to heat, leading to residual stress and deformation, which always carries the risk of "crack recurrence" and "secondary damage." Hinode Water Supply Equipment Co., Ltd.'s "Mechanical Stitching Method" is a new technique that allows for the repair of metal cracks without applying heat. By using special bolts and reinforcement plates, the crack is physically removed without affecting the base material at all. Repairs can be made even in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. For more details, please contact us or download the catalog.

Metal cracks are one of the concerns in equipment maintenance operations. Conventional welding repair methods can alter the base material around the crack due to heat, leading to residual stress and deformation, which always carries the risk of "crack recurrence" or "secondary damage." Hinode Water Supply Equipment Co., Ltd.'s "Mechanical Stitching Method" is a new technique that allows for metal crack repair without applying heat. By using special bolts and reinforcement plates, the crack is physically removed without affecting the base material with heat. Repairs can be made even in environments where open flames cannot be used. Since no heat is applied, the disassembly of equipment is minimized. For more details, please contact us or download the catalog.