Calculate the energy distribution and angular distribution of ions throughout the entire plasma analysis area!
The "Ion Monte Carlo Simulation Module (IMCSM)" calculates the ion energy distribution and the incident energy/angle distribution at the boundary cell across the entire plasma analysis area. The current PHM calculates the plasma distribution within the device, but in the computational model, the ion energy is assumed to be uniform. However, it is often desired to determine the ion energy at the substrate/target surface. This product uses the calculation results of the PHM (spatial distribution physical quantities) to calculate the ion energy distribution across the entire plasma analysis area as well as at the substrate/target surface. 【Features】 ■ Utilizes the calculation results of the PHM (spatial distribution physical quantities) ■ Calculates the ion energy distribution across the entire plasma analysis area and at the substrate/target surface *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Function List (Partial)】 ■Application Area: Energy distribution of ions in the plasma analysis field and energy/angle distribution of ions incident on the substrate ■Analysis Method: Monte Carlo Method ■Target Dimension: 2D ■Solver: Driver IMCSM / Module IMCSM ■GUI Features: Use of the included GUIM (PNG file output, print output, text data input/output, arbitrary zooming of the display screen) ■Pre/Post: Use of the included GUIM ■Analysis Scale: Unlimited (limited by memory capacity and computation time in practice) *For more details, please refer to the PDF materials or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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We are an independent company that aims to develop and sell software for analyzing physical phenomena in the fields of vacuum, plasma, rarefied gases, and gas electronics. We consider creativity, development capability, technical expertise, and competitiveness as our corporate spirit.
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