Surface Shape Simulation Module (FPSM2D)

We can handle various reactions such as PVD, plasma CVD, and etching!

The "Surface Shape Simulation Module (FPSM2D)" is a module that calculates the temporal changes of the substrate and deposited film by considering various reactions on the substrate surface using the particle Monte Carlo method. It can accommodate any reactions, including PVD, plasma CVD, and etching. The incident particle information (particle flux, incident energy, and angle distribution) can be obtained from the output of the PEGASUS gas phase module and PEGASUS surface science module, or specified by the user using the input methods provided by this product. 【Features】 - Uses the particle Monte Carlo method to express shapes while considering solid layer occupancy and surface coverage through a cell method. - Does not use the sharp interfaces characteristic of the cell method; instead, it determines the incident angle from the gradient of solid layer occupancy and applies it to the angle-dependent specular reflection probability and reaction probability. - There are no limitations on the number of gas species, reaction formulas, complexes, or polymers. - Defined on a two-dimensional orthogonal mesh, but the initial shape can be given as an arbitrary shape. *For more details, please refer to the PDF materials or feel free to contact us.*

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