Ion Monte Carlo Simulation Module (IMCSM)

Calculate the energy distribution and angular distribution of ions throughout the entire plasma analysis area!

The "Ion Monte Carlo Simulation Module (IMCSM)" calculates the ion energy distribution and the incident energy/angle distribution at the boundary cell across the entire plasma analysis area. The current PHM calculates the plasma distribution within the device, but in the computational model, the ion energy is assumed to be uniform. However, it is often desired to determine the ion energy at the substrate/target surface. This product uses the calculation results of the PHM (spatial distribution physical quantities) to calculate the ion energy distribution across the entire plasma analysis area as well as at the substrate/target surface. 【Features】 ■ Utilizes the calculation results of the PHM (spatial distribution physical quantities) ■ Calculates the ion energy distribution across the entire plasma analysis area and at the substrate/target surface *For more details, please refer to the PDF document or feel free to contact us.

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