Sputtering Simulation Module (SPUTSM)

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last updated：Oct 06, 2020

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It is possible to perform sputtering analysis with more realistic input data!

The "Sputtering Simulation Module (SPUTSM)" refers to the calculation results of the PIC-MCCM (flux, energy, and incident angle of ions incident on the target) and uses SASAMAL to calculate the emission flux, angular distribution, and energy of sputtered particles. It can utilize the data of incident ions calculated by the PIC-MCCM, which incorporates a particle method for plasma analysis, allowing for sputtering analysis with more realistic input data. Additionally, the input method is simple, requiring only the specification of a data folder for easy incorporation. 【Features】 ■ Calculates the emission flux, angular distribution, and energy of sputtered particles ■ Can use the data of incident ions calculated by the PIC-MCCM, which incorporates a particle method for plasma analysis, as input data ■ Enables sputtering analysis with more realistic input data ■ The input method is easy, requiring only the specification of a data folder for incorporation *For more details, please refer to the PDF materials or feel free to contact us.

Related Link - http://www.psinc.co.jp/products/SPUTSM.html

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basic information

【Function List (Partial)】 ■Application Area: Analysis of Sputtering Phenomena ■Modeling Method: Particle Method ■Analysis Method: Dynamic Monte Carlo Method Based on Two-Body Collision Approximation ■Target Dimension: One-Dimensional ■Solver: Driver SPUTSM / Module SASAMAL ■GUI Features: Uses the included GUIM (PNG file output, print output, text data input/output, arbitrary zooming of display screen) ■Pre/Post: Uses the included GUIM ■Additional Features ・Function to import calculation results from PIC-MCCM ・Built-in database of surface binding energies ・Built-in database of ejection energies ・Rebound cascade tracking ・Background calculations ■Analysis Scale: Unlimited (limited by memory capacity and computation time in practice) *For more details, please refer to the PDF document or feel free to contact us.