Neutral Particle DSMC Module (DSMCM)

By specifying the new collision calculation method, it is possible to perform calculations with cell sizes greater than the mean free path!

The "Neutral Particle DSMC Module (DSMCM)" is a module that uses the DSMC method (Discrete Simulation of Macroscopic Systems), which involves placing a large number of sample particles and probabilistically triggering collisions among them according to a physical model to track their behavior. It is designed to analyze the flow fields of rarefied gases within various vacuum devices. It is capable of analyzing the behavior of neutral particles (buffer gas, radical species, sputtering particles) that carry no charge within etching devices, thin film manufacturing equipment, and sputtering devices. Additionally, by specifying a new collision calculation method, it can also analyze viscous flow regions (Kn < 0.01). 【Features】 - In principle, it can analyze flow fields from free molecular flow to gas flow at atmospheric pressure. - Due to computational volume issues, it is effective for applying to low-pressure flow fields. - By specifying a new collision calculation method (U-system), calculations can be performed with cell sizes larger than the mean free path. - By coupling with PIC-MCCM or PHM, the behavior of radical species and sputtering particles can also be calculated rapidly using the test particle Monte Carlo method. *For more details, please refer to the PDF document or feel free to contact us.*

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